Invention Grant
- Patent Title: Local alignment point calibration method in die inspection
-
Application No.: US16700552Application Date: 2019-12-02
-
Publication No.: US11043356B2Publication Date: 2021-06-22
- Inventor: Wei Fang , Kevin Liu , Fei Wang , Jack Jau , Zhaohui Guo
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/06 ; H01J37/22 ; H01J37/30 ; H01J37/304
Abstract:
A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.
Information query
