Invention Grant
- Patent Title: Reactor system for sublimation of pre-clean byproducts and method thereof
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Application No.: US16695274Application Date: 2019-11-26
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Publication No.: US11053585B2Publication Date: 2021-07-06
- Inventor: John Tolle , Eric Hill
- Applicant: ASM IP HOLDING B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP HOLDING B.V.
- Current Assignee: ASM IP HOLDING B.V.
- Current Assignee Address: NL Almere
- Agency: Sand, Sebolt & Wernow Co., LPA
- Main IPC: C23C16/44
- IPC: C23C16/44 ; H05B3/26 ; C23C16/46 ; C23C16/458 ; H05B6/10 ; C23C14/02 ; C23C14/50 ; C23C16/02
Abstract:
A reactor system and related methods are provided which may include a heating element in a wafer tray. The heating element may be used to heat the wafer tray and a substrate or wafer seated on the wafer tray within a reaction chamber assembly, and may be used to cause sublimation of a native oxide of the wafer.
Information query
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