Invention Grant
- Patent Title: Actively cooled vacuum isolation valve
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Application No.: US16408752Application Date: 2019-05-10
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Publication No.: US11054058B2Publication Date: 2021-07-06
- Inventor: Gordon Hill , David F. Broyer , David C. Neumeister , Bradly Raymond Lefevre
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Burns & Levinson, LLP
- Agent Joseph M. Maraia; Steven M. Mills
- Main IPC: F16K49/00
- IPC: F16K49/00 ; F16K1/22 ; F16K1/46 ; F16K1/12 ; F16K3/06 ; F16K31/122 ; F16K41/10 ; F16K51/02

Abstract:
A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.
Public/Granted literature
- US20190271410A1 ACTIVELY COOLED VACUUM ISOLATION VALVE Public/Granted day:2019-09-05
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