公开(公告)号：US20190271410A1

公开(公告)日：2019-09-05

申请号：US16408752

申请日：2019-05-10

Applicant: MKS Instruments, Inc.

Inventor： Gordon Hill ,  David F. Broyer ,  David C. Neumeister ,  Bradly Raymond Lefevre

IPC: F16K49/00 ,  F16K1/46 ,  F16K51/02 ,  F16K41/10 ,  F16K1/12 ,  F16K3/06 ,  F16K1/22 ,  F16K31/122

Abstract: A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

公开(公告)号：US20170292633A1

公开(公告)日：2017-10-12

申请号：US15478623

申请日：2017-04-04

Applicant: MKS Instruments, Inc.

Inventor： Gordon Hill ,  David F. Broyer ,  David C. Neumeister ,  Bradly Raymond Lefevre

IPC: F16K49/00 ,  F16K3/06 ,  F16K31/122 ,  F16K41/10 ,  F16K51/02 ,  F16K1/12 ,  F16K1/22

CPC classification number: F16K49/007 ,  F16K1/126 ,  F16K1/22 ,  F16K1/222 ,  F16K1/46 ,  F16K3/06 ,  F16K31/1221 ,  F16K41/10 ,  F16K51/02

Abstract: A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

公开(公告)号：US11054058B2

公开(公告)日：2021-07-06

申请号：US16408752

申请日：2019-05-10

Applicant: MKS Instruments, Inc.

Inventor： Gordon Hill ,  David F. Broyer ,  David C. Neumeister ,  Bradly Raymond Lefevre

IPC: F16K49/00 ,  F16K1/22 ,  F16K1/46 ,  F16K1/12 ,  F16K3/06 ,  F16K31/122 ,  F16K41/10 ,  F16K51/02

Abstract: A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.