Invention Grant
- Patent Title: Load sensor and load sensor integrated type multiaxial actuator
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Application No.: US16956864Application Date: 2018-12-26
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Publication No.: US11060928B2Publication Date: 2021-07-13
- Inventor: Kui Li , Kotaro Eguchi
- Applicant: MINEBEA MITSUMI Inc.
- Applicant Address: JP Nagano
- Assignee: MINEBEA MITSUMI Inc.
- Current Assignee: MINEBEA MITSUMI Inc.
- Current Assignee Address: JP Nagano
- Agency: Pearne & Gordon LLP
- Priority: JPJP2017-250059 20171226
- International Application: PCT/JP2018/047711 WO 20181226
- International Announcement: WO2019/131700 WO 20190704
- Main IPC: G01L1/00
- IPC: G01L1/00 ; G01L1/22 ; H05K13/04

Abstract:
Provided is a load sensor that may precisely detect a load of pressing force to an object. A load sensor to be used for a multiaxial actuator (10) that has a drive rod (12) that linearly moves in an axial direction in a state where the drive rod (12) is contained in a housing (11), and a suction rod (22) that is arranged in parallel with the drive rod (12), linearly moves at the same time as the drive rod (12) in the axial direction, and has a tip end portion (22a) to be pressed, when a chip is to be suctioned, against the chip, includes a coupling member (30) that couples the drive rod (12) and the suction rod (22), in which the coupling member (30) has a first coupling part (31) that couples the drive rod (12), and a second coupling part (32) that couples the suction rod (22) in an integrated state, and the first coupling part (31) has a strain body part (311) that is formed to be thinner than the second coupling part (32) and supports the drive rod (12), and strain gauges (41) to (44) attached to the strain body part (311).
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