发明授权
- 专利标题: Imidazoyl urea polymers and their use in metal or metal alloy plating bath compositions
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申请号: US15748203申请日: 2016-08-19
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公开(公告)号: US11066553B2公开(公告)日: 2021-07-20
- 发明人: Heiko Brunner , Lars Kohlmann , Agnieszka Witczak , Olivier Mann
- 申请人: Atotech Deutschland GmbH
- 申请人地址: DE Berlin
- 专利权人: Atotech Deutschland GmbH
- 当前专利权人: Atotech Deutschland GmbH
- 当前专利权人地址: DE Berlin
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: EP15183118 20150831
- 国际申请: PCT/EP2016/069683 WO 20160819
- 国际公布: WO2017/036816 WO 20170309
- 主分类号: C08L75/02
- IPC分类号: C08L75/02 ; C08G71/02 ; C25D3/38 ; C07C275/22 ; C07D233/61
摘要:
The present invention relates to imidazoyl urea polymers and their use in aqueous acidic plating baths for metal or metal alloy deposition such as electrolytic deposition of copper or alloys thereof in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of metal ions and an imidazoyl urea polymer. The plating bath is particularly useful for filling recessed structures and build-up of pillar bump structures.
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