Invention Grant
- Patent Title: Automated method for integrated analysis of back end of the line yield, line resistance/capacitance and process performance
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Application No.: US16684919Application Date: 2019-11-15
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Publication No.: US11074387B2Publication Date: 2021-07-27
- Inventor: Prasad Bhosale , Michael Rizzolo , Chih-Chao Yang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: G06F30/367
- IPC: G06F30/367 ; G06F30/398 ; G06F119/18 ; H01L21/66 ; G06N5/02 ; G06N20/00

Abstract:
A method of electrical device manufacturing that includes measuring a first plurality of dimensions and electrical performance from back end of the line (BEOL) structures; and comparing the first plurality of dimensions with a second plurality of dimensions from a process assumption model to determine dimension variations by machine vision image processing. The method further includes providing a plurality of scenarios for process modifications by applying machine image learning to the dimension variations and electrical variations in the in line electrical measurements from the process assumption model. The method further includes receiving production dimension measurements and electrical measurements at a manufacturing prediction actuator. The at least one of the dimensions or electrical measurements received match one of the plurality of scenarios the manufacturing prediction actuator using the plurality of scenarios for process modifications effectuates a process change.
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