Invention Grant
- Patent Title: Microfeature workpieces having alloyed conductive structures, and associated methods
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Application No.: US16722652Application Date: 2019-12-20
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Publication No.: US11075146B2Publication Date: 2021-07-27
- Inventor: Warren M. Farnworth , Rick C. Lake , William M. Hiatt
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00 ; H01L23/488 ; H01L21/768 ; H01L23/498

Abstract:
Microfeature workpieces having alloyed conductive structures, and associated methods are disclosed. A method in accordance with one embodiment includes applying a volume of material to a bond pad of a microfeature workpiece, with the volume of material including a first metallic constituent and the bond pad including a second constituent. The method can further include elevating a temperature of the volume of material while the volume of material is applied to the bond pad to alloy the first metallic constituent and the second metallic constituent so that the first metallic constituent is alloyed generally throughout the volume of material. A thickness of the bond pad can be reduced from an initial thickness T1 to a reduced thickness T2.
Public/Granted literature
- US20200219793A1 MICROFEATURE WORKPIECES HAVING ALLOYED CONDUCTIVE STRUCTURES, AND ASSOCIATED METHODS Public/Granted day:2020-07-09
Information query
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