- 专利标题： Process for controlling, under void, a jet of particles with an aerodynamic lens and associated aerodynamic lens
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申请号： US15381542申请日： 2016-12-16
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公开(公告)号： US11076476B2公开(公告)日： 2021-07-27
- 发明人: Olivier Sublemontier , Youri Rousseau
- 申请人： Commissariat A L'energie Atomique Et Aux Energies Alternatives
- 申请人地址： FR Paris
- 专利权人： Commissariat A L'energie Atomique Et Aux Energies Alternatives
- 当前专利权人： Commissariat A L'energie Atomique Et Aux Energies Alternatives
- 当前专利权人地址： FR Paris
- 代理机构： Alston & Bird LLP
- 优先权： FR1562865 20151218
- 主分类号： H05H3/00
- IPC分类号： H05H3/00 ; C23C24/04 ; B05B1/30
摘要：
The invention relates to a method for controlling the divergence of a jet of particles in vacuo with an aerodynamic lens, the aerodynamic lens including at least one chamber; a diaphragm, a so-called inlet diaphragm, intended to form an inlet of the aerodynamic lens for a jet of particles, the inlet diaphragm having a given diameter (d1); and another diaphragm, a so-called outlet diaphragm, intended to form an outlet of the aerodynamic lens for this jet of particles; the method including: a step for generating the jet of particles from the inlet to the outlet, in vacuo, of the aerodynamic lens; and a step for adjusting the diameter (ds) of the outlet diaphragm for controlling the divergence of the jet of particles.
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