Invention Grant
- Patent Title: Semiconductor package molding device and method of manufacturing semiconductor device
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Application No.: US16401558Application Date: 2019-05-02
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Publication No.: US11081374B2Publication Date: 2021-08-03
- Inventor: Hee Ju Seo , Jae Won Choi , Sung Bok Hong , Young Jin Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0101936 20180829
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/56 ; B29C45/58 ; B29C45/63 ; B29C45/34

Abstract:
A semiconductor package molding device is provided. The semiconductor package molding device includes a chamber lower part which comprises a lower mold configured to receive a molding target, a chamber upper part configured to engage with the chamber lower part to isolate the inside of a chamber from the outside of the chamber, the chamber upper part including an upper mold configured to form a cavity with the lower mold, a first vent hole located between the chamber upper part and the chamber lower part, the first vent hole configured to discharge gas from the inside of the cavity after the chamber upper part and the chamber lower part engage with each other, a pot which is formed in the lower mold in the chamber lower part, a plunger configured to push up a molding material in the pot, a second vent hole which is formed in a side surface of the pot in the chamber lower part and a cavity vacuum pump configured to discharge gas through the first vent hole and the second vent hole.
Public/Granted literature
- US20200075363A1 SEMICONDUCTOR PACKAGE MOLDING DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2020-03-05
Information query
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