Invention Grant
- Patent Title: Scanning transmission electron microscope and aberration correction method
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Application No.: US16776153Application Date: 2020-01-29
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Publication No.: US11087951B2Publication Date: 2021-08-10
- Inventor: Shigeyuki Morishita , Izuru Chiyo
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JPJP2019-015595 20190131
- Main IPC: H01J37/153
- IPC: H01J37/153 ; H01J37/22 ; H01J37/28

Abstract:
In a scanning transmission electron microscope, a control unit performs: processing of calculating a first auto-correlation function that is an auto-correlation function of a first scanning transmission electron microscope image; processing of acquiring a first intensity profile along a straight line that passes through a center of the first auto-correlation function; processing of obtaining a position of an inflection point that is closest to the center of the first auto-correlation function in the first intensity profile and adopting an intensity at the position as a first reference intensity; processing of obtaining an aberration coefficient by fitting a first aberration function to an isointensity line that connects positions where intensity is equal to the first reference intensity in the first auto-correlation function and by fitting a second aberration function to an isointensity line that connects positions where intensity is equal to a second reference intensity in a second auto-correlation function; and processing of controlling an electron optical system based on the aberration coefficient.
Public/Granted literature
- US20200266025A1 Scanning Transmission Electron Microscope and Aberration Correction Method Public/Granted day:2020-08-20
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