Invention Grant
- Patent Title: Quartz component with protective coating
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Application No.: US15910739Application Date: 2018-03-02
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Publication No.: US11087961B2Publication Date: 2021-08-10
- Inventor: Lin Xu , Robin Koshy , John E. Daugherty , Satish Srinivasan , David Wetzel
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/40 ; C23C16/56 ; C23C16/455

Abstract:
A quartz structure includes a protective layer comprising yttrium oxide. The quartz structure may be fabricated by: (a) receiving a quartz structure; and (b) coating the quartz structure with a protective layer comprising yttrium oxide to form a part to be used in the plasma reactor. The part has a size and shape adapted for forming a window or injector in a plasma reactor. The protective layer does not substantially change the size or shape of the quartz structure. The part may be installed in the plasma reactor at a location where, during operation, a plasma will contact or be proximate to the part.
Public/Granted literature
- US20190272981A1 QUARTZ COMPONENT WITH PROTECTIVE COATING Public/Granted day:2019-09-05
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