发明授权
- 专利标题： Electrostatic chuck
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申请号： US16430569申请日： 2019-06-04
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公开(公告)号： US11088006B2公开(公告)日： 2021-08-10
- 发明人: Takamasa Yoshikawa , Hiroharu Yanagisawa , Nobuyuki Iijima
- 申请人： SHINKO ELECTRIC INDUSTRIES CO., LTD.
- 申请人地址： JP Nagano
- 专利权人： SHINKO ELECTRIC INDUSTRIES CO., LTD.
- 当前专利权人： SHINKO ELECTRIC INDUSTRIES CO., LTD.
- 当前专利权人地址： JP Nagano
- 代理机构： IPUSA, PLLC
- 优先权： JPJP2018-114381 20180615
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/67
摘要：
An electrostatic chuck includes a platform, a power feed pin, a tubular insulator, an adhesive layer, and a first primer. The platform includes an electrode. The power feed pin contacts the electrode. The tubular insulator is provided around the power feed pin. The adhesive layer bonds the platform and the tubular insulator together. The first primer is provided on a surface of the tubular insulator facing toward the adhesive layer.
公开/授权文献
- US20190385883A1 ELECTROSTATIC CHUCK 公开/授权日：2019-12-19
信息查询
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