A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.