- 专利标题: One-axis and two-axis rotation rate sensor
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申请号: US16636532申请日: 2018-07-30
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公开(公告)号: US11099013B2公开(公告)日: 2021-08-24
- 发明人: Peter Degenfeld-Schonburg , Andreas Lassl , Burkhard Kuhlmann , Niels Bode , Nils Felix Kuhlmann , Reinhard Neul
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102017213637.5 20170807
- 国际申请: PCT/EP2018/070574 WO 20180730
- 国际公布: WO2019/030037 WO 20190214
- 主分类号: G01C19/5762
- IPC分类号: G01C19/5762 ; G01C19/5712 ; G01C19/5747 ; G01C19/574
摘要:
A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.
公开/授权文献
- US20200370888A1 ONE-AXIS AND TWO-AXIS ROTATION RATE SENSOR 公开/授权日:2020-11-26
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