公开(公告)号：US11466985B2

公开(公告)日：2022-10-11

申请号：US16636798

申请日：2018-07-30

Applicant: Robert Bosch GmbH

Inventor： Jan-Timo Liewald ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5705 ,  G01C19/5747 ,  G01C19/5783 ,  G01C19/5733

Abstract: A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.

公开(公告)号：US20200370888A1

公开(公告)日：2020-11-26

申请号：US16636532

申请日：2018-07-30

Applicant: Robert Bosch GmbH

Inventor： Peter Degenfeld-Schonburg ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Niels Bode ,  Nils Felix Kuhlmann ,  Reinhard Neul

IPC: G01C19/5762 ,  G01C19/5712 ,  G01C19/5747

Abstract: A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.

公开(公告)号：US20200284583A1

公开(公告)日：2020-09-10

申请号：US16645268

申请日：2018-09-20

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul ,  Frank Schatz

IPC: G01C19/5733 ,  G02B26/08

Abstract: A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.

公开(公告)号：US11953323B2

公开(公告)日：2024-04-09

申请号：US17793025

申请日：2021-01-29

Applicant: Robert Bosch GmbH

Inventor： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC: G01C19/5747 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US20210172737A1

公开(公告)日：2021-06-10

申请号：US16761598

申请日：2018-10-25

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5712 ,  G01C19/5733

Abstract: A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

公开(公告)号：US20190078887A1

公开(公告)日：2019-03-14

申请号：US16127791

申请日：2018-09-11

Applicant: Robert Bosch GmbH

Inventor： Niels Bode ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5762 ,  G01C19/5712

Abstract: A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.

公开(公告)号：US20230038004A1

公开(公告)日：2023-02-09

申请号：US17793025

申请日：2021-01-29

Applicant: Robert Bosch GmbH

Inventor： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US11421991B2

公开(公告)日：2022-08-23

申请号：US16761598

申请日：2018-10-25

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC: G01C19/5712 ,  G01C19/5747 ,  G01C19/5733

Abstract: A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

公开(公告)号：US11099013B2

公开(公告)日：2021-08-24

申请号：US16636532

申请日：2018-07-30

Applicant: Robert Bosch GmbH

Inventor： Peter Degenfeld-Schonburg ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Niels Bode ,  Nils Felix Kuhlmann ,  Reinhard Neul

IPC: G01C19/5762 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/574

Abstract: A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.

公开(公告)号：US11365969B2

公开(公告)日：2022-06-21

申请号：US16645268

申请日：2018-09-20

Applicant: Robert Bosch GmbH

Inventor： Andreas Lassl ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul ,  Frank Schatz

IPC: G01C19/5733 ,  G02B26/08 ,  H03H9/02 ,  B81B3/00

Abstract: A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.