One-axis and two-axis rotation rate sensor

    公开(公告)号:US11099013B2

    公开(公告)日:2021-08-24

    申请号:US16636532

    申请日:2018-07-30

    申请人: Robert Bosch GmbH

    摘要: A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.

    YAW-RATE SENSOR
    5.
    发明申请
    YAW-RATE SENSOR 审中-公开
    YAW-RATE传感器

    公开(公告)号:US20150276408A1

    公开(公告)日:2015-10-01

    申请号:US14737971

    申请日:2015-06-12

    申请人: ROBERT BOSCH GMBH

    IPC分类号: G01C19/5747

    摘要: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译: 具有基板和多个可移动子结构的偏转速率传感器,其安装在所述基板的表面上,所述可移动子结构联接到共享的,特别是中心的弹簧元件,所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡,具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转,第一科里奥利元件用于检测围绕 第一轴线,第二科里奥利元件被提供用于检测围绕第二轴线的横摆率,所述第二轴线垂直于所述第一轴线定向。