- 专利标题: Nanosheet gated diode
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申请号: US16900888申请日: 2020-06-13
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公开(公告)号: US11101374B1公开(公告)日: 2021-08-24
- 发明人: Alexander Reznicek , Bahman Hekmatshoartabari , Karthik Balakrishnan
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Lou Percello, Attorney, PLLC
- 代理商 Daniel P. Morris
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L29/861 ; H01L29/66 ; H01L29/06
摘要:
One or more gated nanosheet diodes are disposed on a substrate and made from a nanosheet structure. A first (second) source/drain (S/D) is disposed on the substrate. The first (second) S/D has a first (second) S/D doping concentration with a first (second) S/D doping type. One or more p-n junctions form one or more respective diodes. There is a first side and a second side of each of the p-n junctions. The first (second) sides of the p-n junctions electrically and physically connect to the first (second) S/Ds and have the same type of doping, respectively. A gate stack, made of a gate dielectric layer and a gate metal, interfaces and surrounds each of the p-n junctions.
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