Invention Grant
- Patent Title: Optical inspection
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Application No.: US16659938Application Date: 2019-10-22
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Publication No.: US11105740B2Publication Date: 2021-08-31
- Inventor: Amir Shoham , Binyamin Kirshner , David Goldovsky , Nitzan Chamiel
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01N21/47
- IPC: G01N21/47 ; G01N21/21 ; G01N21/88 ; G01N21/956 ; G01N21/95

Abstract:
Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.
Public/Granted literature
- US20210116368A1 OPTICAL INSPECTION Public/Granted day:2021-04-22
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