公开(公告)号：US11105740B2

公开(公告)日：2021-08-31

申请号：US16659938

申请日：2019-10-22

Applicant: Applied Materials Israel Ltd.

Inventor： Amir Shoham ,  Binyamin Kirshner ,  David Goldovsky ,  Nitzan Chamiel

IPC: G01N21/47 ,  G01N21/21 ,  G01N21/88 ,  G01N21/956 ,  G01N21/95

Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.

公开(公告)号：US20210116368A1

公开(公告)日：2021-04-22

申请号：US16659938

申请日：2019-10-22

Applicant: Applied Materials Israel Ltd.

Inventor： Amir Shoham ,  Binyamin Kirshner ,  David Goldovsky ,  Nitzan Chamiel

IPC: G01N21/47 ,  G01N21/21

Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.