公开(公告)号：US20230417683A1

公开(公告)日：2023-12-28

申请号：US18367591

申请日：2023-09-13

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2021/8848

Abstract: An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.

公开(公告)号：US20180284031A1

公开(公告)日：2018-10-04

申请号：US15474210

申请日：2017-03-30

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Amir Shoham ,  Ido Dolev ,  Yariv Simovitch

IPC: G01N21/88 ,  G06K9/00 ,  G06T7/00 ,  G01N21/956

Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations.

公开(公告)号：US11385188B1

公开(公告)日：2022-07-12

申请号：US16544889

申请日：2019-08-19

Applicant: Applied Materials Israel, Ltd.

Inventor： Amir Shoham ,  Yoav Berlatzky ,  Haim Feldman

IPC: G01N21/956

Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

公开(公告)号：US11105740B2

公开(公告)日：2021-08-31

申请号：US16659938

申请日：2019-10-22

Applicant: Applied Materials Israel Ltd.

Inventor： Amir Shoham ,  Binyamin Kirshner ,  David Goldovsky ,  Nitzan Chamiel

IPC: G01N21/47 ,  G01N21/21 ,  G01N21/88 ,  G01N21/956 ,  G01N21/95

Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.

公开(公告)号：US10386311B1

公开(公告)日：2019-08-20

申请号：US15803789

申请日：2017-11-05

Applicant: Applied Materials Israel, Ltd.

Inventor： Amir Shoham ,  Yoav Berlatzky ,  Haim Feldman

IPC: G01B11/30 ,  G01N21/956

Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.

公开(公告)号：US09470751B2

公开(公告)日：2016-10-18

申请号：US14153982

申请日：2014-01-13

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Amir Shoham ,  Alon Litman

IPC: G01R31/305 ,  G01R31/26 ,  G01R31/28

CPC classification number: G01R31/305 ,  G01R31/2812 ,  G01R31/2853

Abstract: A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.

Abstract translation: 一种用于评估导体的系统和方法，所述方法可以包括：通过第一电子束照射导体的第一区域，从而对第一区域充电; 通过第二电子束照射导体的第二区域; 并且其中所述第一和第二区域的聚集体尺寸是所述导体的总体尺寸的一部分; 通过检测器检测基本上从第二区域发射的检测到的发射电子并产生指示检测到的发射电子的检测信号; 以及由处理器处理检测信号以提供关于导体的导电性的信息。

公开(公告)号：US11029253B2

公开(公告)日：2021-06-08

申请号：US15474210

申请日：2017-03-30

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Amir Shoham ,  Ido Dolev ,  Yariv Simovitch

IPC: G01N21/21 ,  G01N21/88 ,  G06T7/00 ,  G01N21/956

Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations.

公开(公告)号：US20210116368A1

公开(公告)日：2021-04-22

申请号：US16659938

申请日：2019-10-22

Applicant: Applied Materials Israel Ltd.

Inventor： Amir Shoham ,  Binyamin Kirshner ,  David Goldovsky ,  Nitzan Chamiel

IPC: G01N21/47 ,  G01N21/21

Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.

公开(公告)号：US11796783B2

公开(公告)日：2023-10-24

申请号：US17506040

申请日：2021-10-20

Applicant: Applied Materials Israel Ltd.

Inventor： Elad Eizner ,  Amir Shoham

IPC: G02B21/06 ,  G02B5/30 ,  G01N21/47 ,  G01N21/95

CPC classification number: G02B21/06 ,  G01N21/47 ,  G01N21/9501 ,  G02B5/3025 ,  G01N2201/063

Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.

公开(公告)号：US20150193926A1

公开(公告)日：2015-07-09

申请号：US14149645

申请日：2014-01-07

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoav Berlatzky ,  Amir Shoham ,  Ido Dolev

IPC: G06T7/00 ,  G01N33/00 ,  G06T7/60 ,  G01N21/55

CPC classification number: G01N33/00 ,  G01N21/8806 ,  G01N2021/8822 ,  G01N2033/0095

Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.

Abstract translation: 一种方法和装置，其可以包括被布置成用辐射照射样品表面并收集来自样品表面的反射辐射的光学器件; 其中所述光学器件包括具有对应于收集或照明的不同角度区域的多个光瞳段的光瞳; 以及检测模块，布置成接收反射的辐射并且为每个瞳孔段产生瞳孔段检测信号。