Invention Grant
- Patent Title: Detector module for a photo-acoustic gas sensor
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Application No.: US16534143Application Date: 2019-08-07
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Publication No.: US11105776B2Publication Date: 2021-08-31
- Inventor: Horst Theuss , Rainer Markus Schaller
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102018120061.7 20180817
- Main IPC: G01N29/24
- IPC: G01N29/24 ; G01N21/17

Abstract:
A detector module is disclosed. In one example, the detector module is for a photo-acoustic gas sensor and comprises a first substrate made of a semiconductor material and comprising a first surface and a second surface opposite to the first surface, a second substrate comprising a third surface, a fourth surface opposite to the third surface, and a first recess formed in the fourth surface. The second substrate is connected with its fourth surface to the first substrate so that the first recess forms an airtight-closed first cell which is filled with a reference gas and a pressure sensitive element comprising a membrane disposed in contact with the reference gas. The detector module is further configured such that a beam of light pulses passes through the first substrate and thereby enters the first cell.
Public/Granted literature
- US20200057031A1 DETECTOR MODULE FOR A PHOTO-ACOUSTIC GAS SENSOR Public/Granted day:2020-02-20
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