Invention Grant
- Patent Title: Sound transducer structure and method for manufacturing a sound transducer structure
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Application No.: US16779203Application Date: 2020-01-31
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Publication No.: US11115755B2Publication Date: 2021-09-07
- Inventor: Alfons Dehe , Stefan Barzen , Marc Fueldner
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Shumaker & Sieffert, P.A.
- Priority: DE102006051982.5 20061103,DE102006055147.8 20061122
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R7/00

Abstract:
For manufacturing a sound transducer structure, membrane support material is applied on a first main surface of a membrane carrier material and membrane material is applied in a sound transducing region and an edge region on a surface of the membrane support material. In addition, counter electrode support material is applied on a surface of the membrane material and recesses are formed in the sound transducing region of the membrane material. Counter electrode material is applied to the counter electrode support material and membrane carrier material and membrane support material are removed in the sound transducing region to the membrane material.
Public/Granted literature
- US20200169819A1 SOUND TRANSDUCER STRUCTURE AND METHOD FOR MANUFACTURING A SOUND TRANSDUCER STRUCTURE Public/Granted day:2020-05-28
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