- 专利标题: Thermally enhanced semiconductor package with at least one heat extractor and process for making the same
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申请号: US16204214申请日: 2018-11-29
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公开(公告)号: US11127648B2公开(公告)日: 2021-09-21
- 发明人: Julio C. Costa , George Maxim
- 申请人: Qorvo US, Inc.
- 申请人地址: US NC Greensboro
- 专利权人: Qorvo US, Inc.
- 当前专利权人: Qorvo US, Inc.
- 当前专利权人地址: US NC Greensboro
- 代理机构: Withrow & Terranova, P.L.L.C.
- 主分类号: H01L23/28
- IPC分类号: H01L23/28 ; H01L23/48 ; H01L23/52 ; H01L23/36 ; H01L23/31 ; H01L23/482 ; H01L23/495 ; H01L23/498 ; H05K1/02
摘要:
The present disclosure relates to a thermally enhanced package, which includes a carrier, a thinned die over the carrier, a mold compound, and a heat extractor. The thinned die includes a device layer over the carrier and a dielectric layer over the device layer. The mold compound resides over the carrier, surrounds the thinned die, and extends beyond a top surface of the thinned die to define an opening within the mold compound and over the thinned die. The top surface of the thinned die is at a bottom of the opening. At least a portion of the heat extractor is inserted into the opening and in thermal contact with the thinned die. Herein the heat extractor is formed of a metal or an alloy.
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