Invention Grant
- Patent Title: Positioning device, stiffness reduction device and electron beam apparatus
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Application No.: US16723995Application Date: 2019-12-20
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Publication No.: US11131937B2Publication Date: 2021-09-28
- Inventor: Michaël Johannes Christiaan Ronde , Johannes Hubertus Antonius Van De Rijdt , Maarten Frans Janus Kremers , Erik Maria Rekkers
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: EP18215161 20181221
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; H01L21/67

Abstract:
A positioning device configured to displace an object is disclosed. The positioning device comprises a stage to support the object, an actuator to move the stage with respect to a reference in a direction of movement, a balance mass arranged between the actuator and the reference to reduce transfer of reaction forces from the actuator to the reference, a support device arranged between the reference and the balance mass to support the balance mass, and a gravity compensator acting between the reference and the balance mass to exert a lifting force on the balance mass to reduce a gravitational support force to be provided by the support device to support the balance mass.
Information query