Invention Grant
- Patent Title: Ceramic baseplate with channels having non-square corners
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Application No.: US16108416Application Date: 2018-08-22
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Publication No.: US11133211B2Publication Date: 2021-09-28
- Inventor: Feng Wang , Eric A. Pape
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67
Abstract:
A substrate support includes: a first plate configured to support a substrate; and a second plate that is connected to the first plate. The second plate includes at least one of: an internal coolant channel configured to receive coolant; and an internal gas channel configured to receive gas. The at least one of the internal coolant channel and the internal gas channel includes one of: chamfered internal corners; and staired internal corners.
Public/Granted literature
- US20200066564A1 CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS Public/Granted day:2020-02-27
Information query
IPC分类:
