Invention Grant
- Patent Title: Method for forming lateral heterojunction bipolar devices and the resulting devices
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Application No.: US16430843Application Date: 2019-06-04
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Publication No.: US11133397B2Publication Date: 2021-09-28
- Inventor: Alexander Lee Martin , Jagar Singh
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Main IPC: H01L31/072
- IPC: H01L31/072 ; H01L29/66 ; H01L29/737 ; H01L21/285 ; H01L29/417 ; H01L21/033 ; H01L29/423 ; H01L29/16

Abstract:
One illustrative method of forming heterojunction bipolar devices includes, among other things, forming a first gate structure above an active semiconductor layer, forming a second gate structure adjacent a first side of the first gate structure, forming a third gate structure adjacent a second side of the first gate structure, forming an emitter of a bipolar transistor in the active semiconductor layer between the first gate structure and the second gate structure, forming a collector of the bipolar transistor in the active semiconductor layer between the first gate structure and the third gate structure, and forming a first base contact contacting the active region adjacent an end of the first gate structure, wherein a portion of the active semiconductor layer positioned under the first gate structure defines a base of the bipolar transistor.
Information query
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