- 专利标题: Trilayer Josephson junction structure with small air bridge and no interlevel dielectric for superconducting qubits
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申请号: US16417711申请日: 2019-05-21
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公开(公告)号: US11133452B2公开(公告)日: 2021-09-28
- 发明人: Josephine B. Chang , Gerald W. Gibson , Mark B. Ketchen
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Randall Bluestone
- 主分类号: H01L39/22
- IPC分类号: H01L39/22 ; H01L39/24 ; H01L39/02 ; H01L27/18 ; H01L49/02
摘要:
A technique relates to a trilayer Josephson junction structure. A dielectric layer is on a base electrode layer that is on a substrate. A counter electrode layer is on the dielectric layer. First and second counter electrodes are formed from the counter electrode layer. First and second dielectric layers are formed from the dielectric layer. First and second base electrodes are formed from base electrode layer. The first counter electrode, first dielectric layer, and first base electrode form a first stack. The second counter electrode, second dielectric layer, and second base electrode form a second stack. A shunting capacitor is between first and second base electrodes. An ILD layer is deposited on the substrate, the first and second counter electrodes, and the first and second base electrodes. A contact bridge connects the first and second counter electrodes. An air gap is formed underneath the contact bridge by removing ILD.
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