Invention Grant
- Patent Title: High quality factor MEMS silicon hinge and slot-cut resonator for a vibratory gyroscope
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Application No.: US16102565Application Date: 2018-08-13
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Publication No.: US11137249B2Publication Date: 2021-10-05
- Inventor: Lian X. Huang , Logan D. Sorenson , Chia-Ming “Gavin” Chang , Raviv Perahia , Hung Nguyen , David T. Chang
- Applicant: HRL Laboratories, LLC
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: G01C19/5677
- IPC: G01C19/5677 ; G01C19/5684

Abstract:
A resonant structure comprising at least two coaxial rings, wherein adjacent coaxial rings have adjacent peripheries and are attached together by a plurality of connection structures regularly arranged along said adjacent peripheries; and wherein a first ring has a first ring portion with a first radial thickness and a second ring, portion, in a vicinity of a first connection structure, with a second radial thickness smaller than said first radial thickness.
Public/Granted literature
- US20190072388A1 HIGH QUALITY FACTOR MEMS SILICON HINGE AND SLOT-CUT RESONATOR FOR A VIBRATORY GYROSCOPE Public/Granted day:2019-03-07
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