Continuous online self-calibrating resonant FM microelectromechanical systems (MEMS) accelerometer

    公开(公告)号:US11493534B1

    公开(公告)日:2022-11-08

    申请号:US16673878

    申请日:2019-11-04

    IPC分类号: G01P21/00 B81B3/00 G01P15/08

    摘要: A self-calibration method for an accelerometer having a proof mass separated by a gap from a drive electrode and a sense electrode includes initializing the accelerometer to resonate, applying a first bias voltage to the sense electrode and a second bias voltage to the drive electrode to obtain a first scale factor, measuring a first acceleration over a first time interval, swapping the first bias voltage on the sense electrode with the second bias voltage previously on the drive electrode and the second bias voltage on the drive electrode with the first bias voltage previously on the sense electrode so that a bias voltage on the sense electrode is set to the second bias voltage and a bias voltage on the drive electrode is set to the second bias voltage to obtain a second scale factor, measuring a second acceleration over a second time interval, and calculating a true acceleration.

    MEMS-BASED SENSOR SUITE
    6.
    发明申请

    公开(公告)号:US20180238930A1

    公开(公告)日:2018-08-23

    申请号:US15897819

    申请日:2018-02-15

    摘要: A microelectromechanical (MEMS) sensor suite including a three axis accelerometer including an accelerometer sensor polyhedron having a series of faces, and a series of axial accelerometers on three faces of the series of faces of the accelerometer sensor polyhedron. The MEMS sensor suite also includes a three axis magnetometer including a magnetometer sensor polyhedron having a series of faces, and a series of axial magnetometers on three faces of the series of faces of the magnetometer sensor polyhedron.

    Micro-scale piezoelectric resonating magnetometer

    公开(公告)号:US09977097B1

    公开(公告)日:2018-05-22

    申请号:US14628182

    申请日:2015-02-20

    IPC分类号: G01R33/028

    CPC分类号: G01R33/0283 G01R33/0286

    摘要: A magnetometer has a resonating structure which is naturally resonant in at least first and second resonant modes, a resonant frequency of the second mode being at least an order of magnitude greater than a resonant frequency of the first mode, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of said loop. First and second oscillators are provided, the first oscillator being coupled to the loop for applying an oscillating current to the loop, the oscillating current having a frequency essentially equal to the resonant frequency of the first mode of the resonating structure, the second oscillator being coupled to said sense electrodes, the second oscillator oscillating with a fundamental frequency corresponding to the resonant frequency of the second mode of the resonating structure, the second oscillator also producing sidebands indicative of the magnetometer sensing an external magnetic field.

    ELECTRIC GRADIENT FORCE DRIVE AND SENSE MECHANISM FOR A MICRO-ELECTRO-MECHANICAL-SYSTEM GYROSCOPE
    8.
    发明申请
    ELECTRIC GRADIENT FORCE DRIVE AND SENSE MECHANISM FOR A MICRO-ELECTRO-MECHANICAL-SYSTEM GYROSCOPE 有权
    电子机械系统陀螺仪的电动力驱动和感应机构

    公开(公告)号:US20150000401A1

    公开(公告)日:2015-01-01

    申请号:US13930769

    申请日:2013-06-28

    IPC分类号: G01C19/56

    摘要: An apparatus for driving and sensing motion in a gyroscope including a dielectric mass, an anchor, a spring coupled between the anchor and the dielectric mass, a substrate adjacent the dielectric mass, an insulator layer on the substrate, and a first electrode and a second electrode on the insulator layer. When an alternating current voltage is applied between the first and second electrodes, an electric field gradient is generated in the dielectric mass and causes the dielectric mass to move relative to the anchor. When the dielectric mass has motion relative to the anchor and a voltage is applied between the first and second electrodes, the movement of the dielectric mass generates a current at the first and second electrodes proportional to the motion.

    摘要翻译: 一种用于在陀螺仪中驱动和感测运动的装置,包括介电质量块,锚固体,耦合在锚固体和电介质块之间的弹簧,与介电质量块相邻的衬底,衬底上的绝缘体层,以及第一电极和第二电极 绝缘体层上的电极。 当在第一和第二电极之间施加交流电压时,在电介质中产生电场梯度,并使介质质量相对于锚移动。 当介电质量具有相对于锚的运动并且在第一和第二电极之间施加电压时,电介质的运动在第一和第二电极处产生与运动成比例的电流。