- Patent Title: Multi-axial force sensor including piezoresistive groups, method of manufacturing the multi-axial force sensor, and method for operating the multi-axial force sensor
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Application No.: US16019092Application Date: 2018-06-26
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Publication No.: US11137299B2Publication Date: 2021-10-05
- Inventor: Mohammad Abbasi Gavarti , Daniele Caltabiano , Francesco Braghin
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102017000071798 20170627
- Main IPC: G01L1/18
- IPC: G01L1/18 ; H01L41/25 ; G01L1/22 ; G01L5/162 ; G01L1/26

Abstract:
A microelectromechanical transducer includes a semiconductor body having first and second surfaces opposite to one another. A plurality of trenches extend in the semiconductor body from the first surface towards the second surface, including a first pair of trenches having a respective main direction of extension along a first axis, and a second pair of trenches having a respective main direction of extension along a second axis orthogonal to the first axis. A first piezoresistive sensor and a second piezoresistive sensor extend at the first surface of the semiconductor body respectively arranged between the first and second pair of trenches. The first piezoresistive sensor, the second piezoresistive sensor and the plurality of trenches form an active region. A first structural body is mechanically coupled to the first surface of the semiconductor body to form a first sealed cavity which encloses the active region.
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