Invention Grant
- Patent Title: Device test pad probe card structure with individual probe manipulation capability
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Application No.: US16291755Application Date: 2019-03-04
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Publication No.: US11137418B2Publication Date: 2021-10-05
- Inventor: Kushagra Sinha , Pablo Nieves , Reinaldo Vega
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Randall Bluestone
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/073 ; G01R31/28 ; G01R1/04 ; G01R3/00

Abstract:
A test probe assembly for use in testing a semiconductor wafer includes a probe card, a plurality of test probes mounted to the probe card and one or more piezoelectric elements mounted to each test probe. The piezoelectric elements are configured to move respective probe ends of the individual test probes in at least one direction to facilitate realignment of the probe ends for semiconductor wafer testing.
Public/Granted literature
- US20200284823A1 DEVICE TEST PAD PROBE CARD STRUCTURE WITH INDIVIDUAL PROBE MANIPULATION CAPABILITY Public/Granted day:2020-09-10
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