Invention Grant
- Patent Title: Micromechanical mirror structure with improved mechanical and reflectivity features and corresponding manufacturing process
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Application No.: US16248379Application Date: 2019-01-15
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Publication No.: US11137592B2Publication Date: 2021-10-05
- Inventor: Luca Lamagna , Stefano Losa , Silvia Rossini , Federico Vercesi , Elena Cianci , Graziella Tallarida , Claudia Wiemer
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102018000001111 20180116
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B1/18 ; G02B1/14 ; B81B1/00 ; G02B5/08
Abstract:
A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.
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