Invention Grant
- Patent Title: Laser processing apparatus including a supply nozzle and a suction structure over a stage
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Application No.: US16177049Application Date: 2018-10-31
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Publication No.: US11148229B2Publication Date: 2021-10-19
- Inventor: Do-sun Kim , Taekkyo Kang , Seungho Myoung , Minkyu Choi , Gyoowan Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2017-0144171 20171031
- Main IPC: B23K26/28
- IPC: B23K26/28 ; B23K26/38 ; B23K26/14 ; B08B15/04 ; B23K26/142 ; B23K26/361 ; B08B5/02 ; B23K103/00 ; B23K26/70

Abstract:
A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.
Public/Granted literature
- US20190126405A1 LASER PROCESSING APPARATUS Public/Granted day:2019-05-02
Information query
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