公开(公告)号：US11148229B2

公开(公告)日：2021-10-19

申请号：US16177049

申请日：2018-10-31

Applicant: Samsung Display Co., Ltd.

Inventor： Do-sun Kim ,  Taekkyo Kang ,  Seungho Myoung ,  Minkyu Choi ,  Gyoowan Han

IPC: B23K26/28 ,  B23K26/38 ,  B23K26/14 ,  B08B15/04 ,  B23K26/142 ,  B23K26/361 ,  B08B5/02 ,  B23K103/00 ,  B23K26/70

Abstract: A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.

公开(公告)号：US20190126405A1

公开(公告)日：2019-05-02

申请号：US16177049

申请日：2018-10-31

Applicant: Samsung Display Co., Ltd.

Inventor： Do-sun Kim ,  Taekkyo Kang ,  Seungho Myoung ,  Minkyu Choi ,  Gyoowan Han

IPC: B23K26/38 ,  B23K26/14 ,  B23K26/142 ,  B08B15/04

Abstract: A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.