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公开(公告)号：US20190105736A1
公开(公告)日：2019-04-11
申请号：US15973462
申请日：2018-05-07
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil OH , Gyoowan Han , Wonyong Kim , Seungho Myoung , Jaeseok Park , Alexander Voronov , Jinhong Jeun
IPC: B23K26/362 , C22C38/08 , B23K26/06 , B23K26/067 , B23K26/082
Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.
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公开(公告)号：US09823464B2
公开(公告)日：2017-11-21
申请号：US14704897
申请日：2015-05-05
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Kyubum Kim , Seungho Myoung , Jekil Ryu , Wonhee Oh
CPC classification number: G02B26/0816 , G02B26/085 , G02B27/646
Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.
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3.发明公开公开(公告)号：US20240316892A1
公开(公告)日：2024-09-26
申请号：US18587157
申请日：2024-02-26
Applicant: Samsung Display Co., Ltd.
Inventor： Janghoon Park , Dongwook Kim , Yonghyun Kim , Seungho Myoung
CPC classification number: B30B15/041 , B30B15/0035 , B30B15/0094 , B30B15/062 , B30B15/287 , H10K59/1201 , H10K71/50
Abstract: Provided are an attachment pressing apparatus and a method of manufacturing a display device using the attachment pressing apparatus. The attachment pressing apparatus includes a body portion that is tubular and extends in a first direction, a wing portion connected to a side of the body portion in the first direction and extending in a second direction intersecting the first direction, a pressing portion penetrating the wing portion in an inner space of the body portion in the first direction and pressing an attachment, and a compression portion connecting another side of the body portion in the first direction and the pressing portion.
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公开(公告)号：US20220297236A1
公开(公告)日：2022-09-22
申请号：US17838243
申请日：2022-06-12
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil OH , Gyoowan HAN , Wonyong KIM , Seungho Myoung , Jaeseok Park , Alexander VORONOV , Jinhong JEUN
IPC: B23K26/362 , C22C38/08 , B23K26/067 , B23K26/082 , B23K26/06 , B23K26/382
Abstract: An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.
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Patent Agency Ranking
5.发明授权公开(公告)号：US11148229B2
公开(公告)日：2021-10-19
申请号：US16177049
申请日：2018-10-31
Applicant: Samsung Display Co., Ltd.
Inventor： Do-sun Kim , Taekkyo Kang , Seungho Myoung , Minkyu Choi , Gyoowan Han
IPC: B23K26/28 , B23K26/38 , B23K26/14 , B08B15/04 , B23K26/142 , B23K26/361 , B08B5/02 , B23K103/00 , B23K26/70
Abstract: A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.
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公开(公告)号：US11358240B2
公开(公告)日：2022-06-14
申请号：US15973462
申请日：2018-05-07
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil Oh , Gyoowan Han , Wonyong Kim , Seungho Myoung , Jaeseok Park , Alexander Voronov , Jinhong Jeun
IPC: B23K26/362 , C22C38/08 , B23K26/067 , B23K26/082 , B23K26/06 , B23K26/382 , B23K103/02
Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.
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公开(公告)号：US20190148641A1
公开(公告)日：2019-05-16
申请号：US16138710
申请日：2018-09-21
Applicant: Samsung Display Co., Ltd.
Inventor： Wonyong Kim , Gyoowan Han , Taekkyo Kang , Seungho Myoung , Taekil Oh
IPC: H01L51/00 , H01L51/56 , C23C16/04 , B23K26/364
Abstract: An apparatus for manufacturing a mask is provided. The apparatus includes a stage on which a pre-mask is disposed, and a laser irradiation device including a laser generation member, an optical system for controlling a shape of a laser beam, and a scanner for adjusting a path of a laser beam that has the shape controlled by the optical system. The pre-mask includes a first pattern groove defined on a front surface and a second pattern groove defined on a rear surface that corresponds to the front surface. A first portion and a second portion are defined in a first direction that is a thickness direction of the pre-mask. The laser beam with the controlled shape is irradiated to the second portion of the pre-mask in a second direction crossing the first direction, a mask having an opening, in which the second portion is removed, is provided.
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公开(公告)号：US20190126405A1
公开(公告)日：2019-05-02
申请号：US16177049
申请日：2018-10-31
Applicant: Samsung Display Co., Ltd.
Inventor： Do-sun Kim , Taekkyo Kang , Seungho Myoung , Minkyu Choi , Gyoowan Han
IPC: B23K26/38 , B23K26/14 , B23K26/142 , B08B15/04
Abstract: A laser processing apparatus may include: a laser generator configured to generate a laser beam; a stage configured to support a target object; at least one supply nozzle on the stage to eject an air toward the stage; a suction unit configured to inhale external air; and a suction structure on the stage and adjacent to the at least one supply nozzle. The suction structure may include a suction hole connected to the suction unit to inhale the external air. The suction structure may include an inclined surface in which the suction hole is defined. The suction structure may include a first surface adjacent to the supply nozzle, and an opening may be defined in a region of the first surface adjacent to a bottom surface. A distance between the inclined surface and the target object may be less than or equal to a height of the opening.
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公开(公告)号：US20160103313A1
公开(公告)日：2016-04-14
申请号：US14704897
申请日：2015-05-05
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Kyubum Kim , Seungho Myoung , Jekil Ryu , Wonhee Oh
CPC classification number: G02B26/0816 , G02B26/085 , G02B27/646
Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.
Abstract translation: 光学模块包括反射镜单元，该反射镜单元包括反射镜保持器和反射镜保持器上的反射镜，反射镜保持件包括第一板; 支撑镜子单元的中心导轨; 以及致动器，其构造成围绕旋转轴线旋转镜单元。 致动器包括在第一板处的第一致动器和分别在第二和第三板处的第二和第三致动器，并且在平行于旋转轴线的方向上彼此间隔开，并且第一致动器构造成由第二致动器 以及第三致动器以围绕旋转轴线旋转镜单元。
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