Invention Grant
- Patent Title: Stress compensation for piezoelectric optical MEMS devices
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Application No.: US15890781Application Date: 2018-02-07
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Publication No.: US11148939B2Publication Date: 2021-10-19
- Inventor: YungShan Chang , Ricky A. Jackson , Jeff W. Ritchison , Neng Jiang
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: G02B26/06
- IPC: G02B26/06 ; G02B13/14 ; B81C1/00 ; B81B7/02 ; B81B3/00

Abstract:
An apparatus includes a lens material forming a lens. The apparatus also includes a piezoelectric capacitor over the lens material, where the piezoelectric capacitor is configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens. The apparatus further includes at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor. The at least one stress compensation ring is configured to at least partially reduce bending of the lens material caused by stress on or in the lens material.
Public/Granted literature
- US20180179054A1 STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES Public/Granted day:2018-06-28
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