Invention Grant
- Patent Title: Sample inspection device and sample inspection method
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Application No.: US16609728Application Date: 2018-12-20
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Publication No.: US11150204B2Publication Date: 2021-10-19
- Inventor: Tomohiro Nishitani , Atsushi Koizumi , Haruka Shikano
- Applicant: PHOTO ELECTRON SOUL INC.
- Applicant Address: JP Nagoya
- Assignee: PHOTO ELECTRON SOUL INC.
- Current Assignee: PHOTO ELECTRON SOUL INC.
- Current Assignee Address: JP Nagoya
- Agency: Intellectual Property Law Group LLP
- Priority: JPJP2017-252709 20171227
- International Application: PCT/JP2018/046926 WO 20181220
- International Announcement: WO2019/131410 WO 20190704
- Main IPC: G01N23/2251
- IPC: G01N23/2251 ; H01J37/073 ; H01J37/244 ; H01J37/22 ; H01J37/252

Abstract:
The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.
Public/Granted literature
- US20200080949A1 SAMPLE INSPECTION DEVICE AND SAMPLE INSPECTION METHOD Public/Granted day:2020-03-12
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