Invention Grant
- Patent Title: Semiconductor device including interconnection structure including copper and tin and semiconductor package including the same
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Application No.: US16404841Application Date: 2019-05-07
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Publication No.: US11152317B2Publication Date: 2021-10-19
- Inventor: Ju-Il Choi , Pil-Kyu Kang , Hoechul Kim , Hoonjoo Na , Jaehyung Park , Seongmin Son
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2018-0113157 20180920
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/16 ; H01L23/31 ; H01L27/146

Abstract:
A semiconductor device and a semiconductor package, the device including a pad interconnection structure that penetrates a first buffer dielectric layer and a second buffer dielectric layer, wherein the pad interconnection structure includes copper and tin, the pad interconnection structure includes a central part, a first intermediate part surrounding the central part; a second intermediate part surrounding the first intermediate part, and an outer part surrounding the second intermediate part, a grain size of the outer part is less than a grain size of the second intermediate part, the grain size of the second intermediate part is less than a grain size of the first intermediate part, and the grain size of the first intermediate part is less than a grain size of the central part.
Public/Granted literature
- US20200098711A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME Public/Granted day:2020-03-26
Information query
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