- Patent Title: Polishing pads and systems and methods of making and using the same
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Application No.: US15766643Application Date: 2016-10-07
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Publication No.: US11154959B2Publication Date: 2021-10-26
- Inventor: Duy K. Lehuu , David F. Slama
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent Daniel J. Iden
- International Application: PCT/US2016/055908 WO 20161007
- International Announcement: WO2017/062719 WO 20170413
- Main IPC: B24B37/22
- IPC: B24B37/22 ; B24B37/24 ; B24B37/26 ; B24D3/28 ; B24D11/02 ; B24D18/00 ; H01L21/304

Abstract:
The present disclosure relates to polishing pads which include a polishing layer, a porous substrate and an interfacial region. The present disclosure relates to a method of making the polishing pads. The present disclosure relates to a method of polishing a substrate, the method of polishing including: providing a polishing pad according to any one of the previous polishing pads; providing a substrate, contacting the working surface of the polishing pad with the substrate surface, moving the polishing pad and the substrate relative to one another while maintaining contact between the working surface of the polishing pad and the substrate surface, wherein polishing is conducted in the presence of a polishing solution.
Public/Granted literature
- US20180281148A1 POLISHING PADS AND SYSTEMS AND METHODS OF MAKING AND USING THE SAME Public/Granted day:2018-10-04
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