Invention Grant
- Patent Title: Detector comprising a waveguide
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Application No.: US16938188Application Date: 2020-07-24
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Publication No.: US11156776B2Publication Date: 2021-10-26
- Inventor: Jan Genoe , Robert Gehlhaar
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: Moser Taboada
- Priority: EP19188072 20190724
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02B6/122 ; G02B6/12 ; H01L31/0232

Abstract:
A semiconductor detector (100) for electromagnetic radiation within a wavelength range is disclosed, comprising a first waveguide portion (110), a funnel element (130) configured to funnel incident electromagnetic radiation into a first end (112) of the first waveguide portion, and a second waveguide portion (120) extending in parallel with the first waveguide portion. The second waveguide portion is coupled to the first waveguide portion and configured to out-couple electromagnetic radiation from the first waveguide portion, within a sub-range of the wavelength range. Further, a photodetector (140) including a photoactive layer (144) is arranged at a second end (114) of the first waveguide portion and at an end (124) of the second waveguide portion, and configured to separately detect electromagnetic radiation transmitted through and exiting the first waveguide portion and the second waveguide portion.
Public/Granted literature
- US20210026070A1 DETECTOR COMPRISING A WAVEGUIDE Public/Granted day:2021-01-28
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