- Patent Title: Backplane for display device and method of manufacturing the same
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Application No.: US16871185Application Date: 2020-05-11
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Publication No.: US11164932B2Publication Date: 2021-11-02
- Inventor: Jaewoo Jeong , Hyungue Kim , Jongjun Baek
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Cantor Colburn LLP
- Priority: KR10-2016-0155810 20161122
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L27/12 ; H01L21/3213 ; H01L21/311 ; H01L51/00 ; H01L51/52 ; H01L21/027

Abstract:
A method of manufacturing a backplane for a display device includes forming an insulation layer on a substrate, forming a pad electrode layer on the insulation layer, forming a photoresist pattern on the pad electrode layer in the pad region, etching the pad electrode layer and a portion of the insulation layer by the photoresist pattern as an etch-stop layer so as to simultaneously form a pad electrode and a side protection layer, the side protection layer covering a sidewall of the pad electrode, and stripping the photoresist pattern.
Public/Granted literature
- US20200273943A1 BACKPLANE FOR DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-08-27
Information query
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