Invention Grant
- Patent Title: Middle of line gate structures
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Application No.: US16386902Application Date: 2019-04-17
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Publication No.: US11171237B2Publication Date: 2021-11-09
- Inventor: Yanping Shen , Halting Wang , Hui Zang , Jiehui Shu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M Calderon
- Main IPC: H01L23/482
- IPC: H01L23/482 ; H01L29/78 ; H01L21/8238 ; H01L29/66 ; H01L21/8234

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to middle of line gate structures and methods of manufacture. The structure includes: a plurality of adjacent gate structures; a bridged gate structure composed of a plurality of the adjacent gate structures; source and drain regions adjacent to the bridged gate structure and comprising source and drain metallization features; and contacts to the bridged gate structure and the source and drain metallization features.
Public/Granted literature
- US20200335619A1 MIDDLE OF LINE GATE STRUCTURES Public/Granted day:2020-10-22
Information query
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