Invention Grant
- Patent Title: Wafer prober to facilitate testing of a wafer using nanosecond pulses
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Application No.: US16917124Application Date: 2020-06-30
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Publication No.: US11181572B2Publication Date: 2021-11-23
- Inventor: Yuanzhen Zhuang , Lucas Morales , Raman Srinivasan , Sean Burns , Siu Kwan Cheung , Tian Shi , Tao Li
- Applicant: Lumentum Operations LLC
- Applicant Address: US CA San Jose
- Assignee: Lumentum Operations LLC
- Current Assignee: Lumentum Operations LLC
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A wafer testing system may comprise a chuck, a wafer carrier, a cathode plate, and a probe card. The chuck may be configured to hold the wafer carrier. The wafer carrier may be configured to hold a wafer on a surface of the wafer carrier, wherein the surface of the wafer carrier comprises one or more contact features protruding from the surface of the wafer carrier. The cathode plate may be configured to provide an electrical connection between the wafer carrier and the probe card, wherein a portion of a surface of the cathode plate is configured to be disposed on the one or more contact features of the wafer carrier. The probe card may be configured to test, using one or more probes associated with the probe card, the wafer when the wafer is on the surface of the wafer carrier.
Public/Granted literature
- US20210325451A1 WAFER PROBER TO FACILITATE TESTING OF A WAFER USING NANOSECOND PULSES Public/Granted day:2021-10-21
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