Invention Grant
- Patent Title: Memory device and method for forming the same
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Application No.: US16918259Application Date: 2020-07-01
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Publication No.: US11183575B1Publication Date: 2021-11-23
- Inventor: Zhongwang Sun , Zhong Zhang , Lei Liu , Wenxi Zhou , Zhiliang Xia
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Anova Law Group, PLLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/11529 ; H01L21/28 ; H01L27/11573

Abstract:
Memory device includes a bottom-select-gate (BSG) structure. Cut slits are formed vertically through the BSG structure, on a substrate. A cell-layers structure is formed on the BSG structure. Gate-line slits are formed vertically through the cell-layers structure and the BSG structure, into the substrate and arranged along a first lateral direction to distinguish finger regions. The gate-line slits include a first gate-line slit between first and second finger regions, the first gate-line slit including gate-line sub-slits. The cut slits include a first cut-slit, formed in the second finger region and connecting to a gate-line sub-slit to define a BSG in a first portion of the second finger region. The BSG in the first portion of the second finger region is electrically connected to cell strings in the first finger region through an inter portion between the one gate-line sub-slit and an adjacent gate-line sub-slit.
Public/Granted literature
- US20210367051A1 MEMORY DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2021-11-25
Information query
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