Invention Grant
- Patent Title: Method for producing at least one optoelectronic component, and optoelectronic component
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Application No.: US16758172Application Date: 2018-10-23
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Publication No.: US11183612B2Publication Date: 2021-11-23
- Inventor: Petrus Sundgren , Christoph Klemp
- Applicant: OSRAM OLED GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OLED GmbH
- Current Assignee: OSRAM OLED GmbH
- Current Assignee Address: DE Regensburg
- Agency: MH2 Technology Law Group LLP
- Priority: DE102017125217.7 20171027
- International Application: PCT/EP2018/078987 WO 20181023
- International Announcement: WO2019/081480 WO 20190502
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L21/78
Abstract:
The invention relates to a method for producing at least one optoelectronic component (100) comprising the steps
A) providing an auxiliary carrier (1),
B) epitaxially applying a sacrificial layer (2) on the auxiliary carrier (1), wherein the sacrificial layer (2) comprises germanium,
C) epitaxially applying a semiconductor layer sequence (3) on the sacrificial layer (2),
D) removing the sacrificial layer (2) by means of dry etching (9), such that the auxiliary carrier (1) is removed from the semiconductor layer sequence (3).
A) providing an auxiliary carrier (1),
B) epitaxially applying a sacrificial layer (2) on the auxiliary carrier (1), wherein the sacrificial layer (2) comprises germanium,
C) epitaxially applying a semiconductor layer sequence (3) on the sacrificial layer (2),
D) removing the sacrificial layer (2) by means of dry etching (9), such that the auxiliary carrier (1) is removed from the semiconductor layer sequence (3).
Public/Granted literature
- US20200313034A1 METHOD FOR PRODUCING AT LEAST ONE OPTOELECTRONIC COMPONENT, AND OPTOELECTRONIC COMPONENT Public/Granted day:2020-10-01
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