Invention Grant
- Patent Title: Plasma generating arrangement
-
Application No.: US16284649Application Date: 2019-02-25
-
Publication No.: US11189463B2Publication Date: 2021-11-30
- Inventor: Paul Bennett
- Applicant: SPTS TECHNOLOGIES LIMITED
- Applicant Address: GB Newport
- Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee Address: GB Newport
- Agency: Hodgson Russ LLP
- Priority: GB1806783 20180425
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma generating arrangement includes a plurality of plasma sources, each plasma source including a respective antenna coil assembly electrically coupled to a common electrical terminal via a respective transmission line. Each transmission line is configured to communicate a radio frequency electrical power signal from the common electrical terminal to the respective antenna coil assembly, and has a length which is an odd multiple of ¼ of the wavelength of the radio frequency electrical power signal.
Public/Granted literature
- US20190333740A1 PLASMA GENERATING ARRANGEMENT Public/Granted day:2019-10-31
Information query