Invention Grant
- Patent Title: Cathode assembly having a dual position magnetron and centrally fed coolant
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Application No.: US15651791Application Date: 2017-07-17
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Publication No.: US11189472B2Publication Date: 2021-11-30
- Inventor: Irena H. Wysok , Kirankumar Savandaiah , Anthony Chih-Tung Chan , Jiao Song , Prashant Prabhu
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/35 ; C23C14/34
Abstract:
Embodiments of a magnetron assembly and a processing system incorporating same are provided herein. In some embodiments, a magnetron assembly includes a body extending along a central axis of the magnetron assembly; a coolant feed structure extending through the body along the central axis to provide a coolant along the central axis to an area beneath the coolant feed structure; and a rotatable magnet assembly coupled to a bottom of the body and having a plurality of magnets.
Public/Granted literature
- US20190019658A1 CATHODE ASSEMBLY HAVING A DUAL POSITION MAGNETRON AND CENTRALLY FED COOLANT Public/Granted day:2019-01-17
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