- Patent Title: Thin film transistor having gate insulating layer including different types of insulating layers, method of manufacturing the same, and display device comprising the same
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Application No.: US16517263Application Date: 2019-07-19
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Publication No.: US11195862B2Publication Date: 2021-12-07
- Inventor: Jaeman Jang , InTak Cho
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: KR10-2018-0169586 20181226
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L51/05 ; H01L29/51 ; H01L29/49

Abstract:
A thin film transistor includes an active layer on a substrate, a gate electrode configured to be spaced from the active layer and partially overlapped with the active layer, and a gate insulating layer, at least a part of the gate insulating layer being disposed between the active layer and the gate electrode, wherein the gate insulating layer includes a first gate insulating layer between the active layer and the gate electrode, and a second gate insulating layer configured to have a dielectric constant (k) which is different from a dielectric constant of the first gate insulating layer, and disposed in a same layer as the first gate insulating layer, and wherein at least a part of the second gate insulating layer is disposed between the active layer and the gate electrode.
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