Invention Grant
- Patent Title: Piezoelectric vibrator and piezoelectric vibration device
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Application No.: US15472576Application Date: 2017-03-29
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Publication No.: US11196403B2Publication Date: 2021-12-07
- Inventor: Ryota Kawai , Daisuke Nakamura , Toshio Nishimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Arent Fox LLP
- Priority: JPJP2014-255042 20141217
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/10 ; H03H9/24 ; H03H9/17 ; H03H9/15
Abstract:
A piezoelectric vibrator is a piezoelectric vibrator including a vibration portion. The vibration portion has an n-type Si layer which is a degenerated semiconductor and which has a resistivity of not less than 0.5 mΩcm and not greater than 1.2 mΩcm and preferably not greater than 0.9 mΩcm.
Public/Granted literature
- US20170201226A1 PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION DEVICE Public/Granted day:2017-07-13
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